Zephyr B Manuel d'utilisateur Page 5

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Honeywell Sensing and Control 5
Honeywell Zephyr
TM
Digital Aiflow Sensors
HAF Series–High Accuracy, 10 SLPM, 15 SLPM,
20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM
Rev. B
50080060
Figure 3. Mounting Dimensions (For reference only: mm [in].)
Port Style: Manifold Mount
Port Style: 22 mm OD Tapered Male Fitting per ISO 5356
68
[2.7]
30
[1.2]
110
[4.3]
39,5
[1.56]
18,3
[0.72]
14
[0.6]
21,0
[0.83]
2X 5,70
[0.22]
14,8
[0.58]
2X 21,0
[0.83]
35
[1.4]
42,4
[1.67]
54
[2.1]
51,5
[2.03]
18,0
[0.71]
2X 4,50
[0.177]
68
[2.7]
2X 18,3
[0.72]
14,5
[0.57]
14,8
[0.58]
14
[0.6]
39.5
[1.56]
2X 5,20
[0.205]
14,5
[0.57]
44,0
[1.73]
54,4
[2.14]
35,1
[1.38]
44,0
[1.73]
54,4
[2.14]
B
C
A
A
51,5
[2.03]
54
[2.1]
4X 4,50
[0.177]
33
[1.3]
42,4
[1.67]
8
[0.3]
4,0
[0.16]
63,2
[2.49]
87
[3.4]
4X 15,0
[0.59]
34,5
[1.36]
4,0
[0.16]
63,2
[2.49]
87
[3.4]
71,2
[2.80]
4X 5,20
[0.205]
8
[0.3]
16,0
[0.63]
55,2
[2.17]
44,0
[1.73]
54,4
[2.14]
14,5
[0.57]
30,0
[1.2]
14,6
[0.58]
4X 5,60
[0.220]
33,0
[1.30]
44,0
[1.73]
54,4
[2.14]
22,0
[0.87]
30,6
[1.20]
55,2
[2.17]
71,2
[2.80]
D
C
B
A
2X 13,0 DIA.
[0.51]
A
22,0
[0.87]
16,0
[0.63]
Pin 1.
4X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
2X Gland for O-Ring AS568-113, 13,94 mm ID x 2,62 mm
[0.549 in ID x 0.103 in W. Two O-rings, AS568A-113 Durom-
eter A65 to A80 Silicon or Viton, are required to seal sensor to
manifold. O-rings are not included.
Flow channel.
B
A
C
D
Pin 1.
2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
15 mm ID/22 mm OD tapered fitting per ISO 5356.
B
A
C
Mounting Footprint
Mounting Footprint
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