2 Honeywell Sensing and Control
Honeywell Zephyr
TM
Digital Aiflow Sensors
HAF Series–High Accuracy, 10 SLPM, 15 SLPM,
20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM
Rev. B
50080060
Total Error Band:
5
0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
0 %FS to 12.5 %FS
12.5 %FS to 100 %FS
300 SLPM only:
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM)
14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM)
66.6 %FS to 100 %FS (200 SLPM to 300 SLPM)
0.5% FS
4.0% reading
0.5% FS
4.0% reading
7.0% reading
Null accuracy
6
±0.5 %FS
Flow response time
7
1 ms
Warm up time
8
35 ms
Resolution:
10 SLPM
15 SLPM
20 SLPM
50 SLPM
100 SLPM
200 SLPM
300 SLPM
0.002 SLPM
0.003 SLPM
0.003 SLPM
0.008 SLPM
0.015 SLPM
0.020 SLPM
0.030 SLPM
Bus standards
9
I
2
C fast mode (up to 400 kHz)
Proof pressure 150 psig
Reverse polarity protection no
1
Custom and extended temperature compensated ranges are possible. Contact Honeywell for details.
2
Honeywell standard for mass flow rate units is SLPM, which has reference conditions of 0 °C and 1 atm. Custom units are given as LPM with listed reference
conditions at the first mention.
3
Contact Honeywell for requirements with other custom gases for calibration. See the Technical Note “Gas Media Compatibility and Correction Factors”.
4
Accuracy is the maximum deviation in output from nominal over the entire calibrated flow range at 25 ºC. Errors include Offset, Full Scale Span, Linearity,
Flow Hysteresis, and Repeatability. (See Figures 1 and 5.)
5
Total Error Band (TEB) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Total Error Band in-
cludes all Accuracy errors, as well as all temperature effects over the compensated temperature range, including Temperature Offset, Temperature Span and
Thermal Hysteresis. (See Figures 1 and 5.)
6
Null Accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range.
7
Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected
by the pneumatic interface).
8
Warm-up time: time to the first valid flow measurement after power is applied.
9
Refer to the Technical Note “I
2
C Communications with Honeywell Digital Airflow Sensors” for I
2
C protocol information.
Table 6. Operating Specifications
Characteristic Parameter
Supply voltage 3 Vdc to 10 Vdc
Supply current 20 mA max.
Power:
3 Vdc
10 Vdc
60 mW max.
200 mW max.
Calibrated temperature range
1
0 °C to 50 °C [32 °F to 122 °F]
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F]
Full scale (FS) flow
2
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM, 300 SLPM
Calilbrated flow range
0 to 10 SLPM, 0 to 15 SLPM, 0 to 20 SLPM, 0 to 50 SLPM,
0 to 100 SLPM, 0 to 200 SLPM, 0 to 300 SLPM
Calibration gas
3
clean, dry air
Accuracy
4
0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
0 %FS to 14.3 %FS
14.3 %FS to 100 %FS
300 SLPM only:
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM)
14.6 %FS to 100 %FS (44 SLPM to 300 SLPM)
0.5% FS
3.5% reading
0.5% FS
3.5% reading
(5 pages)
(28 pages)
(28 pages)
(2 pages)
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