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Zephyr B Manuel d'utilisateur

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Installation Instructions for the
Honeywell Zephyr
TM
Digital Aiflow Sensors
HAF Series–High Accuracy, 10 SLPM, 15 SLPM,
20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM
50080060
Rev. B
Table 3. Absolute Maximum Ratings
1
Characteristic Parameter
Supply voltage -0.3 Vdc to 11.0 Vdc
Voltage on digital I/O
output pins
-0.3 Vdc to 3.0 Vdc
2
Storage temperature range
-40 °C to 100 °C
[-40 °F to 212 °F]
Maximum flow change 10,000 SLPM/s
Maximum common mode
pressure
60 psi at 25 °C [77 °F]
Maximum flow 350 SLPM
1
Absolute maximum ratings are the extreme limits that the device will
withstand without damage to the device. However, the electrical and
mechanical characteristics are not guaranteed as the maximum limits
(above recommended operating conditions) are approached, nor will the
device necessarily operate at absolute maximum ratings.
2
Digital I/O pins are diode protected at this voltage up to 2 mA. Digital
bus voltage may exceed this value if the maximum digital bus current is
limited to 2 mA or less. The maximum bus current is generally deter-
mined by the bus pull-up resistors
CAUTION
IMPROPER USE
Do not use these products to sense liquid flow.
Failure to comply with these instructions may result in product
damage.
CAUTION
PRODUCT DAMAGE
Do not dissamble these products.
Failure to comply with these instructions may result in product
damage.
Table 1. Compatible Gases
Gas Calibration Type
Dry air standard
Helium (He)
optimized calibration
available
Argon (Ar)
Nitrogen (N
2
)
Nitrous oxide (N
2
O)
Carbon dioxide (CO
2
)
Oxygen (O
2
)
See the Technical Note “Gas
Media Compatibility and
Correction Factors”.
80/20 He/O
2
Mix
Methane (CH4)
Xenon (Xe)
Table 4. Environmental Specifications
Characteristic Parameter
Humidity
0% to 95% RH,
non-condensing
Shock 30 g, 6 ms
Vibration 1.33 g at 10 Hz to 500 Hz
ESD
ESD IEC6100-4-2 air discharge
up to 8 kV, or direct contact
discharge up to 4 kV
Radiated immunity:
test conditions for ≥20 SLPM
test conditions for ≤20 SLPM
Level 3 from 80 MHz to 1000
MHz per IEC61000-4-3
1 meter shielded cable with 3 cm
exposed leads at connector
1 meter shielded cable with 3 cm
exposed leads at connector and
280 Ohm at 1 MHz ferrite bead
GENERAL INFORMATION
Table 2. Materials Specifications
Characteristic Parameter
Wetted
materials
glass reinforced (GR) thermoplastic polymer, gold,
silicon, silicon dioxide, silicon nitride, epoxy,
PCB epoxy composite
Housing GR thermoplastic polymer
Substrate PCB
Adhesives epoxy
Electronic
components
silicon, gold
Compliance RoHS, WEEE
Table 5. Recommended Mounting and Implementation
Characteristic Parameter
Mounting screw size 10-32
Mounting screw torque 1,13 N m [20 in-lb]
Electrical connection 6 pin SIP connector
Pneumatic connection
manifold mount, 22 mm OD tapered male
fitting, G 3/8 female threaded fitting
CAUTION
IMPROPER CLEANING
• Avoid cleaning the sensor; however, if it must be cleaned, use
ispropyl alcohol and dry the device throroughly before use. Cap
the ports or connect housing to the ports before cleaning the sensor
with alcohol. Using alcohol may remove the text on the sensor label;
however, the label ID is hard-coded inside the sensor.
• Do not use III Tri-cholorethane, methylene chloride, methyl
pyrrolidone, or any oxidizing type acide such as formic acid.
• Do not use ultrasonic cleaning.
Failure to comply with these instructions may result in product
damage.
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Résumé du contenu

Page 1 - 50080060

Installation Instructions for theHoneywell ZephyrTM Digital Aiflow SensorsHAF Series–High Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 S

Page 2 - Digital Aiflow Sensors

2 Honeywell Sensing and ControlHoneywell ZephyrTM Digital Aiflow SensorsHAF Series–High Accuracy, 10 SLPM, 15 SLPM,20 SLPM, 50 SLPM, 100 SLPM, 200 S

Page 3

Honeywell Sensing and Control 3Honeywell ZephyrTM Digital Aiflow SensorsHAF Series–High Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200

Page 4

4 Honeywell Sensing and ControlHoneywell ZephyrTM Digital Aiflow SensorsHAF Series–High Accuracy, 10 SLPM, 15 SLPM,20 SLPM, 50 SLPM, 100 SLPM, 200 S

Page 5

Honeywell Sensing and Control 5Honeywell ZephyrTM Digital Aiflow SensorsHAF Series–High Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200

Page 6

6 Honeywell Sensing and ControlHoneywell ZephyrTM Digital Aiflow SensorsHAF Series–High Accuracy, 10 SLPM, 15 SLPM,20 SLPM, 50 SLPM, 100 SLPM, 200 S

Page 7 - February 2014

Sensing and ControlHoneywell1985 Douglas Drive NorthGolden Valley, MN 55422honeywell.com 50080060 Rev. B-EN February 2014© 2014 Honeywell Internationa

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